Invention Grant
- Patent Title: Resistive random-access memory (RRAM) device and forming method thereof
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Application No.: US17953341Application Date: 2022-09-27
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Publication No.: US11997935B2Publication Date: 2024-05-28
- Inventor: Shu-Hung Yu , Chun-Hung Cheng , Chuan-Fu Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 2110212202.2 2021.02.25
- Main IPC: H10N70/00
- IPC: H10N70/00

Abstract:
A resistive random-access memory (RRAM) device, including a bottom electrode, a high work function layer, a resistive material layer and a top electrode sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part, first spacers covering sidewalls of the top part and the top electrode, and second spacers covering sidewalls of the bottom part, thereby constituting a RRAM cell.
Public/Granted literature
- US20230019178A1 RESISTIVE RANDOM-ACCESS MEMORY (RRAM) DEVICE AND FORMING METHOD THEREOF Public/Granted day:2023-01-19
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