Invention Grant
- Patent Title: Piezoelectric actuator, ultrasound element, ultrasound probe, ultrasound device, and electronic device
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Application No.: US17456387Application Date: 2021-11-24
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Publication No.: US11998390B2Publication Date: 2024-06-04
- Inventor: Koji Ohashi , Chikara Kojima , Makoto Furuhata , Tomohide Onogi , Tomohiro Sayama
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 20195034 2020.11.25
- Main IPC: A61B8/00
- IPC: A61B8/00 ; B06B1/02 ; B06B1/06 ; G01S15/89

Abstract:
A piezoelectric actuator includes a vibrating plate including a first surface that closes an opening provided in a substrate and a second surface in which a plurality of piezoelectric elements is provided, a suppression part configured to suppress a vibration of the vibrating plate, and a first wall and a second wall protruding from the first surface to the opening. When a portion where the first electrode, the piezoelectric layer and the second electrode overlap each other is an active part of the piezoelectric element, the first wall and the second wall are provided to sandwich the active part in plan view from the stacking direction of the first electrode, the piezoelectric layer and the second electrode, and the second wall is different from the first wall at least in one of the width, height, length and physical property.
Public/Granted literature
- US20220160331A1 PIEZOELECTRIC ACTUATOR, ULTRASOUND ELEMENT, ULTRASOUND PROBE, ULTRASOUND DEVICE, AND ELECTRONIC DEVICE Public/Granted day:2022-05-26
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