Acoustic transduction structure and manufacturing method thereof and acoustic transducer
Abstract:
The present disclosure provides an acoustic transduction structure including: a base substrate and at least two acoustic transduction units on the base substrate, wherein vibrating cavities of two adjacent acoustic transduction units are spaced apart from each other in a direction parallel to a plane where the base substrate is located, and the at least two acoustic transduction units include: a central acoustic transduction unit and at least one annular acoustic transduction unit around the central acoustic transduction unit. The present disclosure also provides a method for manufacturing the acoustic transduction structure and an acoustic transducer.
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