Invention Grant
- Patent Title: Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same
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Application No.: US17922800Application Date: 2021-05-04
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Publication No.: US11999827B2Publication Date: 2024-06-04
- Inventor: Toshiya Okamura , Tetsuo Okayasu , Thorsten Vom Stein
- Applicant: Merck Patent GmbH
- Applicant Address: DE Darmstadt
- Assignee: Merck Patent GmbH
- Current Assignee: Merck Patent GmbH
- Current Assignee Address: DE Darmstadt
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: EP 173584 2020.05.07
- International Application: PCT/EP2021/061668 2021.05.04
- International Announcement: WO2021/224224A 2021.11.11
- Date entered country: 2022-11-02
- Main IPC: C08G77/60
- IPC: C08G77/60 ; C08G77/62 ; C09D183/16

Abstract:
[Problem] To provide a polycarbosilazane making it possible to form a silicon-containing film which is bearable to acid etching, and a composition comprising the polycarbosilazane. [Means for Solution] The present invention provides a polycarbosilazane comprising a repeating unit of —[R1R2Si—(CH2)n]— and —(R3R4Si—NR5)—, wherein R1, R2, R3 and R4 are each independently a single bond, hydrogen or C1-4 alkyl; R5 is independently a single bond or hydrogen; and n is 1-2, and a composition comprising the polycarbosilazane. The present invention also provides a method for forming a silicon-containing film, comprising coating the composition above a substrate and heating.
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