Flow rate controller and drive device equipped with same
Abstract:
A flow rate controller and a drive device are provided with a cylinder flow passage connected to an air cylinder; a main flow passage for supplying air to and discharging air from the air cylinder; an auxiliary flow passage that has a first throttle valve and through which exhaust air discharged from the air cylinder passes with a smaller flow rate than that of the main flow passage; a switch valve that switches between a first position in which the cylinder flow passage communicates with the main flow passage and a second position in which the cylinder flow passage communicates with the auxiliary flow passage; and a pilot air adjustment part that guides a portion of the exhaust air from the air cylinder as pilot air to the switch valve.
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