Invention Grant
- Patent Title: Polarization-separated, phase-shifted interferometer
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Application No.: US17572353Application Date: 2022-01-10
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Publication No.: US12000698B2Publication Date: 2024-06-04
- Inventor: Noah Gilbert , Joshua Brown
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Smith Baluch LLP
- Main IPC: G01B9/02001
- IPC: G01B9/02001 ; G01B9/02 ; G01B9/02055 ; G01B11/24

Abstract:
A polarization-separated, phase-shifted interferometer can generate interferograms without moving parts. It uses a phase shifter, such as an electro-optic phase modulator, to modulate the relative phase between sample and reference beams. These beams are transformed into orthogonal polarization states (e.g., horizontally and vertically polarized states) and coupled via a common path (e.g., polarization-maintaining fiber) to a polarizing beam splitter (PBS), which sends them into separate sample and reference arms. Quarter-wave plates in the sample and reference arms rotate the polarization states of the sample and reference beams so they are coupled out of the PBS to a detector via a 45° linear polarizer. The polarizer projects the aligned polarization components of the sample and reference beams onto the detector, where they interfere with known relative phase to produce an output that can be used to map surface topography of the test object.
Public/Granted literature
- US20230160682A1 Polarization-Separated, Phase-Shifted Interferometer Public/Granted day:2023-05-25
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