Invention Grant
- Patent Title: Optical interference measuring apparatus and optical interference measuring method
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Application No.: US17614880Application Date: 2020-05-25
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Publication No.: US12000699B2Publication Date: 2024-06-04
- Inventor: Homare Momiyama , Yoshiaki Sasaki , Isao Yoshimine , Chiko Otani , Tetsuya Yuasa
- Applicant: TOPCON CORPORATION , RIKEN
- Applicant Address: JP Tokyo
- Assignee: TOPCON CORPORATION,RIKEN
- Current Assignee: TOPCON CORPORATION,RIKEN
- Current Assignee Address: JP Tokyo; JP Saitama
- Agency: Studebaker & Brackett PC
- Priority: JP 19100827 2019.05.30
- International Application: PCT/JP2020/020582 2020.05.25
- International Announcement: WO2020/241583A 2020.12.03
- Date entered country: 2021-11-29
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/02004 ; G01B9/02091 ; G01N21/01 ; G01N21/45 ; G01N21/47

Abstract:
Provided is an optical interference measuring apparatus including a measuring unit for acquiring an interferogram of an interference wave obtained by irradiating a measuring target and a reference surface with electromagnetic waves and causing reflected waves from a reflecting surface of the measurement target and reflected waves from the reference surface to interfere and a signal processing unit for configuring an intensity profile in the depth direction by performing Fourier transform of the interferogram. The signal processing unit is configured to estimate a parameter for a model formula for an assumed surface count, based on the model formula of an interferogram when it is assumed that the measurement target has a predetermined structure, to select an optimal model by a statistical technique from the model formula to which a parameter estimated for the assumed surface count is applied, and to reconfigure an intensity profile based on the optimal model.
Public/Granted literature
- US20220228850A1 OPTICAL INTERFERENCE MEASURING APPARATUS AND OPTICAL INTERFERENCE MEASURING METHOD Public/Granted day:2022-07-21
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