Invention Grant
- Patent Title: Resonant microelectromechanical sensor with improved operation
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Application No.: US17929872Application Date: 2022-09-06
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Publication No.: US12000859B2Publication Date: 2024-06-04
- Inventor: Marc Sansa Perna , Théo Miani , Thierry Verdot
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 09455 2021.09.09
- Main IPC: G01P15/097
- IPC: G01P15/097 ; G01P15/08 ; H03H9/02

Abstract:
A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, an element that measures a force including at least one resonator of resonant frequency ωrn, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa
Public/Granted literature
- US20230072687A1 RESONANT MICROELECTROMECHANICAL SENSOR WITH IMPROVED OPERATION Public/Granted day:2023-03-09
Information query
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