• Patent Title: System for fracturing a plurality of wafer assemblies
  • Application No.: US17435899
    Application Date: 2020-02-26
  • Publication No.: US12002690B2
    Publication Date: 2024-06-04
  • Inventor: Didier LandruOleg KononchukNadia Ben Mohamed
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: SOITEC
  • Current Assignee: SOITEC
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR 02680 2019.03.15
  • International Application: PCT/FR2020/050370 2020.02.26
  • International Announcement: WO2020/188170A 2020.09.24
  • Date entered country: 2021-09-02
  • Main IPC: H01L21/67
  • IPC: H01L21/67 H01L21/762
System for fracturing a plurality of wafer assemblies
Abstract:
A system for fracturing a plurality of wafer assemblies, one of the wafers of each assembly comprising a plane of weakness and each assembly comprising a peripheral lateral groove comprises: a cradle for keeping the assemblies of the plurality of assemblies spaced apart and parallel to one another, along a storage axis; a separation device for applying separating forces in the peripheral groove of an assembly arranged in a fracture zone of the separating device, the separating force aiming to separate the wafers of the assembly from one another so as to initiate its fracture at the plane of weakness; and a drive device configured to move along the storage axis of the cradle opposite the separating device so as to successively place an assembly of the cradle in the fracture zone of the separation device.
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