Invention Grant
- Patent Title: Capacitor and method for forming the same
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Application No.: US18158452Application Date: 2023-01-23
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Publication No.: US12002802B2Publication Date: 2024-06-04
- Inventor: Meng-Han Lin , Meng-Sheng Chang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- The original application number of the division: US17225722 2021.04.08
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L21/82 ; H01L27/02

Abstract:
An integrated circuit (IC) structure includes a semiconductor substrate, a shallow trench isolation (STI) region, and a capacitor. The STI region is embedded in the semiconductor substrate. The capacitor includes first and second conductive stacks. The first conductive stack includes a first dummy gate strip disposed entirely within the STI region and a plurality of first metal dummy gate contacts landing on the first metal capacitor strip. The second conductive stack includes a second dummy gate strip disposed entirely within the STI region and extending in parallel with the first dummy gate strip, and a plurality of second dummy gate contacts landing on the second dummy gate strip, wherein the first conductive stack is electrically isolated from the second conductive stack.
Public/Granted literature
- US20230163119A1 CAPACITOR AND METHOD FOR FORMING THE SAME Public/Granted day:2023-05-25
Information query
IPC分类: