Invention Grant
- Patent Title: High electron mobility transistor and method of manufacturing the same
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Application No.: US17098896Application Date: 2020-11-16
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Publication No.: US12002879B2Publication Date: 2024-06-04
- Inventor: Sunkyu Hwang , Joonyong Kim , Jongseob Kim , Junhyuk Park , Boram Kim , Younghwan Park , Dongchul Shin , Jaejoon Oh , Soogine Chong , Injun Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200076755 2020.06.23
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/66

Abstract:
Provided is a high electron mobility transistor including: a channel layer comprising a 2-dimensional electron gas (2DEG); a barrier layer on the channel layer and comprising first regions and a second region, the first regions configured to induce the 2DEG of a first density in portions of the channel layer and the second region configured to induce the 2DEG of a second density different from the first density in other portions of the channel layer; source and drain electrodes on the barrier layer; a depletion formation layer formed on the barrier layer between the source and drain electrodes to form a depletion region in the 2DEG; and a gate electrode on the barrier layer. The first regions may include a first edge region and a second edge region corresponding to both ends of a surface of the gate electrode facing the channel layer.
Public/Granted literature
- US20210399120A1 HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-12-23
Information query
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