Invention Grant
- Patent Title: Tunable resistive random access memory cell
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Application No.: US17804912Application Date: 2022-06-01
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Publication No.: US12004435B2Publication Date: 2024-06-04
- Inventor: Min Gyu Sung , Soon-Cheon Seo , Chanro Park
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Matthew Zehrer
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H10B63/00 ; H10N70/00

Abstract:
A method of manufacturing an RRAM cell includes forming a first wire, forming an insulator on the first wire, the insulator having a pore and an insulator surface, and forming a first electrode layer on the first wire and the insulator, the first electrode having an electrode surface. The method further includes recessing the first electrode layer such that the electrode surface is recessed toward the first wire from the insulator surface, forming a switching layer on the insulator and the first electrode, and forming a second electrode on the switching layer.
Public/Granted literature
- US20230397514A1 TUNABLE RESISTIVE RANDOM ACCESS MEMORY CELL Public/Granted day:2023-12-07
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