- Patent Title: Leveling unit for imprinting and imprint apparatus comprising same
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Application No.: US17432646Application Date: 2020-07-20
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Publication No.: US12005724B2Publication Date: 2024-06-11
- Inventor: Kee-Bong Choi , Jae-Jong Lee , Geehong Kim , Hyungjun Lim , Soongeun Kwon , Junhyoung Ahn
- Applicant: Korea Institute of Machinery & Materials
- Applicant Address: KR Daejeon
- Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee Address: KR Daejeon
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20190089737 2019.07.24
- International Application: PCT/KR2020/009503 2020.07.20
- International Announcement: WO2021/015508A 2021.01.28
- Date entered country: 2021-08-20
- Main IPC: B41K3/64
- IPC: B41K3/64 ; F16M11/12 ; F16M11/18

Abstract:
In a leveling unit for imprinting and an imprint apparatus having the leveling unit, the leveling unit includes a base plate, a moving plate and a plurality of link parts. The moving plate is spaced apart from the base plate, and has a reference plane heading for an opposite direction of the base plate. The plurality of link parts connects the base plate with the moving plate, is spaced apart from each other by a predetermined distance along a circumferential direction with respect to a center of the reference plane, and is elastically and independently transformed by a pressing force applied to the reference plane to adjust an inclination of the moving plate.
Public/Granted literature
- US20220161583A1 LEVELING UNIT FOR IMPRINTING AND IMPRINT APPARATUS COMPRISING SAME Public/Granted day:2022-05-26
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