A semiconductor device includes a semiconductor chip having a main surface, a first conductivity type drift region formed in a surface layer portion of the main surface, and a second conductivity type column region formed in a column shape extending in the thickness direction in the drift region, the column region having a lower end portion, an intermediate portion and an upper end portion, wherein the column region has a compensation region including a low concentration portion which is formed between the lower end portion and the intermediate portion, and a high concentration portion which is formed between the intermediate portion and the upper end portion, the compensation region in which a charge balance is compensated within an impurity concentration range between the low concentration portion and the high concentration portion.