Vacuum pump and magnetic-bearing-integrated motor
Abstract:
A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.
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