Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
Abstract:
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a piezoelectric plate having front and back surfaces and an interdigital transducer (IDT). The IDT has a first pitch/mark zone with interleaved fingers having a pitch equal to a first pitch value P1 and a mark equal to a first mark value M1, and a second pitch/mark zone with interleaved fingers having a pitch equal to a second pitch value P2 and a mark equal to a second mark value M2. A radio frequency signal applied to the IDT causes excitation of a same shear primary acoustic mode by both the first pitch/mark zone and the second pitch/mark zone. P1, M1, P2, and M2, are selected such that an amplitude of spurious modes is reduced as compared to a device having a same primary acoustic mode and a single pitch/mark zone.
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