Invention Grant
- Patent Title: Wafer, wafer manufacturing method, device chip manufacturing method, and resistivity markings
-
Application No.: US17382921Application Date: 2021-07-22
-
Publication No.: US12011784B2Publication Date: 2024-06-18
- Inventor: Kazuma Sekiya
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 20131713 2020.08.03
- Main IPC: B23K26/53
- IPC: B23K26/53 ; B23K26/40 ; B23K103/00 ; H01L21/78

Abstract:
A wafer manufacturing method for manufacturing a wafer from an ingot includes forming a peeling layer within the ingot by positioning a condensing point at a depth corresponding to the thickness of the wafer to be produced, and irradiating the ingot with a first laser beam, forming a character, a number, or a mark representing information regarding resistivity in or on the ingot by positioning a condensing point in a region in which devices are not to be formed and irradiating the ingot with a second laser beam, and dividing the ingot with the peeling layer as a starting point.
Public/Granted literature
- US20220032404A1 WAFER, WAFER MANUFACTURING METHOD, AND DEVICE CHIP MANUFACTURING METHOD Public/Granted day:2022-02-03
Information query
IPC分类: