Invention Grant
- Patent Title: Inspection apparatus and inspection method
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Application No.: US17772282Application Date: 2020-10-27
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Publication No.: US12013349B2Publication Date: 2024-06-18
- Inventor: Tomonori Nakamura , Kenichiro Ikemura
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 20005830 2020.01.17
- International Application: PCT/JP2020/040255 2020.10.27
- International Announcement: WO2021/145048A 2021.07.22
- Date entered country: 2022-04-27
- Main IPC: G01N21/956
- IPC: G01N21/956 ; G01B11/27 ; G01N21/64

Abstract:
An inspection apparatus includes a light source unit, cameras, a keyboard, and a controller that determines a wavelength of the excitation light, based on the information on the emission color received by the keyboard, and that controls the light source unit so that the light source unit generates excitation light with the determined wavelength. The controller determines a wavelength longer than an absorption edge wavelength of the substrate of the sample and shorter than a peak wavelength of an emission spectrum of the light-emitting element, the peak wavelength being specified from the information on the emission color, to be the wavelength of the excitation light.
Public/Granted literature
- US20220373480A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2022-11-24
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