Invention Grant
- Patent Title: Inertial measurement unit
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Application No.: US17982668Application Date: 2022-11-08
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Publication No.: US12013412B2Publication Date: 2024-06-18
- Inventor: Toru Watanabe
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 21183112 2021.11.10
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01C19/5783 ; G01P1/02 ; G01P15/18

Abstract:
An inertial measurement unit includes: a substrate; a sealing member; a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor; and a second inertial sensor module including a second inertial sensor and a second package accommodating the second inertial sensor. A material of the first package includes a resin. A material of the second package is an inorganic material. The first inertial sensor module is accommodated in a space between the substrate and the sealing member and thus airtightly sealed therein. The second inertial sensor module is provided outside the space.
Public/Granted literature
- US20230147973A1 INERTIAL MEASUREMENT UNIT Public/Granted day:2023-05-11
Information query
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