Invention Grant
- Patent Title: Transport system, inspection system, and inspection method
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Application No.: US17595461Application Date: 2020-05-15
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Publication No.: US12013429B2Publication Date: 2024-06-18
- Inventor: Seiichiro Motomura
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP 19099727 2019.05.28
- International Application: PCT/JP2020/019449 2020.05.15
- International Announcement: WO2020/241306A 2020.12.03
- Date entered country: 2021-11-17
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01R1/073 ; G01R31/26 ; G01S19/13 ; H01L21/677

Abstract:
According to one aspect of the present disclosure, a transport system includes a mobile cassette unit capable of storing a plurality of structures and supplying the structures to an inspection unit, wherein each of the structures includes a substrate on which a plurality of devices are formed, and an interconnect member including a contact section that electrically contacts an electrode of the plurality of devices.
Public/Granted literature
- US20220206058A1 TRANSPORT SYSTEM, INSPECTION SYSTEM, AND INSPECTION METHOD Public/Granted day:2022-06-30
Information query
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