Invention Grant
- Patent Title: Solid-state imaging device, method of manufacturing the same, and electronic apparatus capable to protect a photoelectric conversion film
-
Application No.: US16940228Application Date: 2020-07-27
-
Publication No.: US12015040B2Publication Date: 2024-06-18
- Inventor: Shigehiro Ikehara , Masahiro Joei
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: CHIP LAW GROUP
- Priority: JP 16065608 2016.03.29
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/02 ; H01L31/0216 ; H04N25/76 ; H10K30/88 ; H10K39/32

Abstract:
The present technology relates to a solid-state imaging device capable of protecting a photoelectric conversion film with a sealing film that has excellent sealing properties and coverage, a method of manufacturing the solid-state imaging device, and an electronic apparatus. A solid-state imaging device includes: a photoelectric conversion film formed on the upper side of a semiconductor substrate; and a sealing film that is formed on the upper layer of the photoelectric conversion film and has a lower etching rate than that of silicon oxide. The present technology can be applied to solid-state imaging devices having a photoelectric conversion film on the upper side of a semiconductor substrate, and the like, for example.
Public/Granted literature
- US20210013254A1 SOLID-STATE IMAGING DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS Public/Granted day:2021-01-14
Information query
IPC分类: