Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US17978344Application Date: 2022-11-01
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Publication No.: US12016171B2Publication Date: 2024-06-18
- Inventor: Se Han Kwon
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T GROUP LLP
- Priority: KR 20200084606 2020.07.09
- The original application number of the division: US17152003 2021.01.19
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768 ; H01L23/532 ; H01L23/535

Abstract:
A semiconductor device and method for fabricating the semiconductor device, which secure an overlay margin between the storage node and the storage node contact plug, as well as a processing margin, by excluding the connecting structure between the storage node and the storage node contact plug. A semiconductor device comprises a storage node contact hole provided between bit line structures, a first plug filling a lower portion of the storage node contact hole, a second plug protruding from the first plug, an insulation layer spacer covering a side wall of the second plug, and a storage node positioned at a higher level than the second plug and including an extension contacting another side wall of the second plug and a portion of a top surface of the first plug.
Public/Granted literature
- US20230052958A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2023-02-16
Information query