Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17840213Application Date: 2022-06-14
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Publication No.: US12016188B2Publication Date: 2024-06-18
- Inventor: Hyuncheol Kim , Yongseok Kim , Dongsoo Woo , Kyunghwan Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20210078919 2021.06.17
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H10K10/50 ; H10K19/00 ; H10K85/20

Abstract:
A semiconductor memory device includes a plurality of semiconductor patterns extending in a first horizontal direction and separated from each other in a second horizontal direction and a vertical direction, each semiconductor pattern including a first source/drain area, a channel area, and a second source/drain area arranged in the first horizontal direction; a plurality of gate insulating layers covering upper surfaces or side surfaces of the channel areas; a plurality of word lines on the upper surfaces or the side surfaces of the channel areas; and a plurality of resistive switch units respectively connected to first sidewalls of the semiconductor patterns, extending in the first horizontal direction, and separated from each other in the second horizontal direction and the vertical direction, each resistive switch unit including a first electrode, a second electrode, and a resistive switch material layer between the first and second electrodes and including carbon nanotubes.
Public/Granted literature
- US20220406848A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-12-22
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