Invention Grant
- Patent Title: Plasma processing system and method of processing substrate
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Application No.: US17004260Application Date: 2020-08-27
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Publication No.: US12020898B2Publication Date: 2024-06-25
- Inventor: Akihiro Yokota
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP 19163794 2019.09.09 JP 20096205 2020.06.02
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
One disclosed plasma processing system includes a chamber, a substrate support, a plasma generator, and first and second electric magnet assemblies. The substrate support is disposed in the chamber. A center of a substrate on the substrate support is positioned on a central axis of the chamber. The plasma generator is configured to generate a plasma in the chamber. The first electric magnet assembly includes one or more first annular coils and is disposed on or above the chamber and configured to generate a first magnetic field in the chamber. The second electric magnet assembly includes one or more second annular coils and is configured to generate a second magnetic field in the chamber. The second magnetic field reduces the intensity of the first magnetic field in the center of the substrate on the substrate support.
Public/Granted literature
- US20210074511A1 PLASMA PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE Public/Granted day:2021-03-11
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