Invention Grant
- Patent Title: Memory device having bit line with stepped profile
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Application No.: US17729250Application Date: 2022-04-26
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Publication No.: US12022649B2Publication Date: 2024-06-25
- Inventor: Tzu-Ching Tsai
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agent Xuan Zhang
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/768 ; H01L23/532

Abstract:
The present application provides a memory device having a bit line (BL) with a stepped profile. The memory device includes a semiconductor substrate including a first surface; and a bit line disposed on the first surface of the semiconductor substrate, wherein the bit line includes a first dielectric layer, a conductive layer disposed over the first dielectric layer, a second dielectric layer disposed over the conductive layer, and a spacer surrounding the first dielectric layer, the conductive layer and the second dielectric layer, wherein the second dielectric layer includes a first portion surrounded by the spacer, and a second portion disposed over the first portion and exposed through the spacer, wherein a first width of the first portion is substantially greater than a second width of the second portion.
Public/Granted literature
- US20230345707A1 MEMORY DEVICE HAVING BIT LINE WITH STEPPED PROFILE Public/Granted day:2023-10-26
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