Invention Grant
- Patent Title: Semiconductor device and method of manufacturing semiconductor device
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Application No.: US17314774Application Date: 2021-05-07
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Publication No.: US12022655B2Publication Date: 2024-06-25
- Inventor: Hyun Ho Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: WILLIAM PARK & ASSOCIATES LTD.
- Priority: KR 20200148739 2020.11.09
- Main IPC: H10B43/10
- IPC: H10B43/10 ; H10B41/27 ; H10B43/27 ; H10B63/00

Abstract:
A semiconductor device and a method of manufacturing same may include a stack including alternately stacked conductive layers and insulating layers, a separation insulating structure passing through the stack, and including a line pattern, first protrusion patterns protruded from the line pattern to one side, and second protrusion patterns protruded from the line pattern to another side, first channel structures passing through the stack at the one side of the separation insulating structure and surrounding the first protrusion patterns, respectively, and second channel structures passing through the stack at the another side of the separation insulating structure and surrounding the second protrusion patterns, respectively.
Public/Granted literature
- US20220149071A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2022-05-12
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