Invention Grant
- Patent Title: Local contacts of three-dimensional memory devices and methods for forming the same
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Application No.: US17321258Application Date: 2021-05-14
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Publication No.: US12022656B2Publication Date: 2024-06-25
- Inventor: Jianzhong Wu , Kun Zhang , Tingting Zhao , Rui Su , Zhongwang Sun , Wenxi Zhou , Zhiliang Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- The original application number of the division: US16862368 2020.04.29
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/768 ; H01L23/535 ; H10B41/27 ; H10B41/35 ; H10B43/35

Abstract:
A method for forming a 3D memory device is disclosed. A channel structure extending vertically through a dielectric stack including interleaved sacrificial layers and dielectric layers above a substrate is formed. A sacrificial plug above and in contact with the channel structure is formed. A slit opening extending vertically through the dielectric stack is formed. A memory stack including interleaved conductive layers and the dielectric layers is formed by replacing, through the slit opening, the sacrificial layers with the conductive layers. A first contact portion is formed in the slit opening. The sacrificial plug is removed after forming the first contact portion to expose the channel structure. A channel local contact above and in contact with the channel structure, and a second contact portion above the first contact portion in the slit opening are simultaneously formed.
Public/Granted literature
- US20210272982A1 LOCAL CONTACTS OF THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2021-09-02
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