Invention Grant
- Patent Title: Inspection device and inspection method
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Application No.: US17642990Application Date: 2020-09-16
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Publication No.: US12023761B2Publication Date: 2024-07-02
- Inventor: Iku Sano , Takeshi Sakamoto
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 19169468 2019.09.18
- International Application: PCT/JP2020/035050 2020.09.16
- International Announcement: WO2021/054353A 2021.03.25
- Date entered country: 2022-03-15
- Main IPC: B23K26/53
- IPC: B23K26/53 ; B23K26/03

Abstract:
A laser processing device includes a stage; a laser irradiation unit; an image capturing unit; a control portion configured to execute controlling the laser irradiation unit such that one or a plurality of modified regions are formed inside the semiconductor substrate when the wafer is irradiated with the laser light, determining whether or not a crack extending from the modified region is in a crack reaching state where the crack has reached a front surface side of the semiconductor substrate on the basis of a signal output from the image capturing unit, and deriving information related to adjustment of irradiation conditions of the laser irradiation unit on the basis of determination results.
Public/Granted literature
- US20220331908A1 INSPECTION DEVICE AND INSPECTION METHOD Public/Granted day:2022-10-20
Information query
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