Invention Grant
- Patent Title: Hydrogen recycle system and hydrogen recycle method
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Application No.: US17056265Application Date: 2019-05-17
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Publication No.: US12024427B2Publication Date: 2024-07-02
- Inventor: Shinji Kambara , Yukio Hayakawa , Tomonori Miura , Tatsuya Ikeda
- Applicant: National University Corporation Tokai National Higher Education and Research System , SAWAFUJI ELECTRIC CO., LTD.
- Applicant Address: JP Aichi
- Assignee: National University Corporation Tokai National HIgher Education and Research System,SAWAFUJI ELECTRIC CO., LTD.
- Current Assignee: National University Corporation Tokai National HIgher Education and Research System,SAWAFUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Aichi; JP Gunma
- Agency: KENEALY VAIDYA LLP
- Priority: JP 18107532 2018.06.05
- International Application: PCT/JP2019/019628 2019.05.17
- International Announcement: WO2019/235169A 2019.12.12
- Date entered country: 2020-11-17
- Main IPC: C01B3/04
- IPC: C01B3/04 ; B01D53/04 ; B01D53/22 ; C01B3/50 ; C01B3/56 ; C23C16/30 ; C23C16/44 ; C23C16/455 ; C30B25/14 ; C30B29/40 ; H01L21/02 ; H01M8/0606

Abstract:
Provided are a hydrogen recycle system and a hydrogen recycle method, whereby hydrogen can be purified to high purity at high yield from a gas, said gas being exhausted from a nitride compound production device, and recycled. The hydrogen recycle system comprises an exhaust gas supply path supplying a gas exhausted from a nitride compound production device, a hydrogen recycle means and a hydrogen supply path. The hydrogen recycle means of the hydrogen recycle system is characterized by comprising: a plasma reaction vessel that defines at least a part of a discharge space; a hydrogen separation membrane that divides the discharge space from a hydrogen flow path communicated with the hydrogen supply path, defines at least a part of the discharge space by one surface thereof and also defines at least a part of the hydrogen flow path by the other surface thereof; an electrode that is disposed outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the supplied exhaust gas.
Public/Granted literature
- US20210238034A1 Hydrogen Recycle System and Hydrogen Recycle Method Public/Granted day:2021-08-05
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