Invention Grant
- Patent Title: Quality prediction method, preparation method and system of conductive gallium oxide based on deep learning and Czochralski method
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Application No.: US17761042Application Date: 2021-02-05
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Publication No.: US12024790B2Publication Date: 2024-07-02
- Inventor: Hongji Qi , Duanyang Chen , Qinglin Sai
- Applicant: HANGZHOU FUJIA GALLIUM TECHNOLOGY CO. LTD.
- Applicant Address: CN Zhejiang
- Assignee: HANGZHOU FUJIA GALLIUM TECHNOLOGY CO. LTD.
- Current Assignee: HANGZHOU FUJIA GALLIUM TECHNOLOGY CO. LTD.
- Current Assignee Address: CN Hangzhou
- Agency: Maier & Maier, PLLC
- Priority: CN 2011640679.2 2020.12.31
- International Application: PCT/CN2021/075570 2021.02.05
- International Announcement: WO2022/141752A 2022.07.07
- Date entered country: 2022-03-16
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B29/16 ; G06N3/082

Abstract:
A quality prediction method, a preparation method and a system of conductive gallium oxide based on deep learning and Czochralski method. The quality prediction method includes the steps of obtaining preparation data of conductive gallium oxide single crystal prepared by Czochralski method. The preparation data includes a seed crystal data, an environmental data, and a control data. The environmental data includes doping element concentration and doping element type; preprocessing the preparation data to obtain a preprocessed preparation data; preparing the preprocessed data is input to a trained neural network model, and a predicted quality data corresponding to the conductive gallium oxide single crystal is obtained through the trained neural network model, and the predicted quality data includes a predicted carrier concentration.
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