Vacuum pump and magnetic bearing
Abstract:
A vacuum pump includes a rotor having a shaft, a base housing the shaft, a thrust disc provided at a lower portion of the shaft, and a magnetic bearing supporting the shaft. The magnetic bearing has a first electromagnet arranged to face an upper surface of the thrust disc, and a second electromagnet arranged to face a lower surface of the thrust disc. The second electromagnet includes a core. The core includes a fastening portion provided with a through-hole into which a bolt that fastens the core to the base is to be inserted. The thickness of the fastening portion in a depth direction of the through-hole is greater than the nominal diameter of the bolt, or the center position of the fastening portion in the depth direction of the through-hole is higher than the center position of the second electromagnet in an up-down direction.
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