Invention Grant
- Patent Title: Device and method for measuring height profiles on an object
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Application No.: US17630063Application Date: 2020-07-17
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Publication No.: US12025424B2Publication Date: 2024-07-02
- Inventor: Bernd Srocka
- Applicant: SENTRONICS METROLOGY GMBH
- Applicant Address: DE Mannheim
- Assignee: SENTRONICS METROLOGY GMBH
- Current Assignee: SENTRONICS METROLOGY GMBH
- Current Assignee Address: DE Mannheim
- Agency: Oliff PLC
- Priority: EP 188318 2019.07.25
- International Application: PCT/EP2020/070349 2020.07.17
- International Announcement: WO2021/013747A 2021.01.28
- Date entered country: 2022-01-25
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01N21/88

Abstract:
An optical device for sensing a surface profile of an object surface of an object by means of interferometric distance measurement, including a beam splitter for splitting a light beam of a light source into first and second sub-beams, a beam divider for dividing each sub-beam into a reference and a measuring beam, a mirror for reflecting the two reference beams, wherein each measuring beam is directed onto a measuring area on the object surface for reflection and after reflection is directed as object beam to the beam divider, each reference beam reflected by the mirror and directed as mirror beam to the beam divider, the object and mirror beams each interfere and are each fed as an evaluation beam to a detector unit for evaluation. Further include a light source for generating a monochromatic light beam, a detector unit, a signal evaluation unit and for determining the surface profile.
Public/Granted literature
- US20220268569A1 DEVICE AND METHOD FOR MEASURING HEIGHT PROFILES ON AN OBJECT Public/Granted day:2022-08-25
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