Invention Grant
- Patent Title: Miniature 3D position-to-optical displacement sensor
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Application No.: US17919158Application Date: 2021-08-24
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Publication No.: US12025438B2Publication Date: 2024-07-02
- Inventor: Genda Chen , Jie Gao , Chuanrui Guo
- Applicant: The Curators of the University of Missouri
- Applicant Address: US MO Columbia
- Assignee: The Curators of the University of Missouri
- Current Assignee: The Curators of the University of Missouri
- Current Assignee Address: US MO Columbia
- Agency: Sandberg Phoenix & von Gontard, P.C.
- International Application: PCT/US2021/047234 2021.08.24
- International Announcement: WO2022/046687A 2022.03.03
- Date entered country: 2022-10-14
- Main IPC: G01D5/353
- IPC: G01D5/353 ; G01B9/02056

Abstract:
A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X-Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).
Public/Granted literature
- US20230160685A1 MINIATURE 3D POSITION-TO-OPTICAL DISPLACEMENT SENSOR Public/Granted day:2023-05-25
Information query
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