Invention Grant
- Patent Title: System and method for liquid leak detection
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Application No.: US17534423Application Date: 2021-11-23
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Publication No.: US12025533B2Publication Date: 2024-07-02
- Inventor: Yu Kai Chen , Li-Jen Wu , Chin-Kun Fang , Ko-Bin Kao
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- The original application number of the division: US16514155 2019.07.17
- Main IPC: G01M3/02
- IPC: G01M3/02 ; G03F7/16 ; H01L21/67
Abstract:
A system for detecting leakage of a liquid supply pipe includes a pipe casing for enclosing an end portion of the liquid supply pipe adjoined to a nozzle and a sensor system configured to detect presence of a liquid leaked from the liquid supply pipe at the end portion. The sensor system is in alignment with the end portion of the liquid supply pipe.
Public/Granted literature
- US20220082468A1 SYSTEM AND METHOD FOR LIQUID LEAK DETECTION Public/Granted day:2022-03-17
Information query
