Invention Grant
- Patent Title: Meta-surface photodetector
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Application No.: US17619560Application Date: 2020-06-19
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Publication No.: US12025555B2Publication Date: 2024-07-02
- Inventor: Alexander Dorodnyy , Alexander Lochbaum , Jürg Leuthold , Lukas Bürgi , Silvio Graf
- Applicant: SENSIRION AG
- Applicant Address: CH Stäfa
- Assignee: SENSIRION AG
- Current Assignee: SENSIRION AG
- Current Assignee Address: CH Stäfa
- Agency: Mannava & Kang, P.C.
- Priority: EP 183649 2019.07.01
- International Application: PCT/EP2020/067229 2020.06.19
- International Announcement: WO2021/001182A 2021.01.07
- Date entered country: 2021-12-15
- Main IPC: G01N21/3504
- IPC: G01N21/3504 ; G01J3/42 ; H01L31/028 ; H01L31/0296 ; H01L31/0304

Abstract:
A photodetector comprises a substrate, and supported by the substrate, a configuration to act as optical resonator and to absorb incident radiation of a band, including infrared. The configuration comprises: a resonant frontside structure facing the incident radiation; a backside structure and arranged between the frontside structure and the substrate; and a layer of an active material made from a semiconducting material, and configured to convert at least part of the incident radiation of the band into charge carriers. The frontside structure or the backside structure is made from electrically conducting material and is in contact with the active material. The configuration is configured to selectively absorb the incident radiation of the band. The frontside structure or the backside structure that is in contact with the active material is contacted by electrical contacts for sensing the charge carriers in the active material. The active material comprises amorphous or polycrystalline material.
Public/Granted literature
- US20220307974A1 META-SURFACE PHOTODETECTOR Public/Granted day:2022-09-29
Information query
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