Dielectric constant measurement method, dielectric measurement device and dielectric measurement program
Abstract:
A permittivity measuring method includes measuring a set of phases at sampling frequencies of at least three points in each of a first-half portion and a second-half portion of a phase characteristic of electromagnetic waves that passed through a measurement target, if the mode of the phase changes of both sets of phases belongs to a phase group in which change of the at least three points in the first half and change of at least three points in the second half are both monotonic change, maximal values, or minimal values, calculating the permittivity using the phase slope of the phases in the first-half portion and the phases in the second-half portion, and if the mode of the phase changes does not belong to the phase group, calculating the permittivity by fitting the phases of either the first half or the second half to a quadratic function.
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