Invention Grant
- Patent Title: Resist underlayer film-forming composition comprising polymer having structural unit having urea linkage
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Application No.: US16483686Application Date: 2018-02-01
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Publication No.: US12025915B2Publication Date: 2024-07-02
- Inventor: Tokio Nishita , Yuichi Goto , Rikimaru Sakamoto , Gun Son
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 17018938 2017.02.03
- International Application: PCT/JP2018/003449 2018.02.01
- International Announcement: WO2018/143359A 2018.08.09
- Date entered country: 2019-08-05
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F220/22 ; C08F220/34 ; G03F7/20

Abstract:
A resist underlayer film-forming composition having a dramatically improved crosslinking ability over conventional compositions, and further, a resist underlayer film-forming composition that crosslinks with a component of a resist material, in order to improve the adhesion of a resist underlayer film to a resist pattern. A resist underlayer film-forming composition for lithography including a copolymer having a structural unit of formula (1) and a structural unit of formula (2):
(wherein each R1 is independently a hydrogen atom or a methyl group; each R2 is independently a C1-3 alkylene group; R3 is a single bond or a methylene group; A is a linear, branched, or cyclic aliphatic group having a carbon atom number of 1 to 12 and optionally having a substituent, or a C6-16 aromatic or heterocyclic group optionally having a substituent; and Pr is a protecting group); a crosslinking agent; an organic acid catalyst; and a solvent.
(wherein each R1 is independently a hydrogen atom or a methyl group; each R2 is independently a C1-3 alkylene group; R3 is a single bond or a methylene group; A is a linear, branched, or cyclic aliphatic group having a carbon atom number of 1 to 12 and optionally having a substituent, or a C6-16 aromatic or heterocyclic group optionally having a substituent; and Pr is a protecting group); a crosslinking agent; an organic acid catalyst; and a solvent.
Information query
IPC分类: