Invention Grant
- Patent Title: Apparatus for generating magnetic fields on substrates during semiconductor processing
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Application No.: US17507122Application Date: 2021-10-21
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Publication No.: US12027352B2Publication Date: 2024-07-02
- Inventor: Suhas Bangalore Umesh , Kishor Kumar Kalathiparambil , Goichi Yoshidome
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: MOSER TABOA
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35 ; H01J37/32

Abstract:
A plasma vapor deposition (PVD) chamber used for depositing material includes an apparatus for influencing ion trajectories during deposition on a substrate. The apparatus includes at least one annular support assembly configured to be externally attached to and positioned below a substrate support pedestal and a magnetic field generator affixed to the annular support assembly and configured to radiate magnetic fields on a top surface of the substrate. The magnetic field generator may include a plurality of symmetrically spaced discrete permanent magnets or may use one or more electromagnets to generate the magnetic fields.
Public/Granted literature
- US20220384164A1 APPARATUS FOR GENERATING MAGNETIC FIELDS ON SUBSTRATES DURING SEMICONDUCTOR PROCESSING Public/Granted day:2022-12-01
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