Invention Grant
- Patent Title: Semiconductive ceramic member
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Application No.: US17279203Application Date: 2019-09-24
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Publication No.: US12027405B2Publication Date: 2024-07-02
- Inventor: Yasuharu Tateyama , Yoshinori Hirano , Naoya Fujita , Senri Tsujitake , Shoji Kohsaka
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: Kyocera Corporation
- Current Assignee: Kyocera Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP 18187535 2018.10.02
- International Application: PCT/JP2019/037299 2019.09.24
- International Announcement: WO2020/071178A 2020.04.09
- Date entered country: 2021-03-24
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/119 ; G01N23/2273

Abstract:
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0
Public/Granted literature
- US20220020626A1 SEMICONDUCTIVE CERAMIC MEMBER Public/Granted day:2022-01-20
Information query
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