Invention Grant
- Patent Title: Edge ring arrangement with moveable edge rings
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Application No.: US17181571Application Date: 2021-02-22
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Publication No.: US12027410B2Publication Date: 2024-07-02
- Inventor: Haoquan Yan , Robert Griffith O'Neill , Raphael Casaes , Jon Mcchesney , Alex Paterson
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01J37/02 ; H01J37/20 ; H01J37/32 ; H01L21/67

Abstract:
An edge ring arrangement for a processing chamber includes a first ring configured to surround and overlap a radially outer edge of an upper plate of a pedestal arranged in the processing chamber, a second ring arranged below the first moveable ring, wherein a portion of the first ring overlaps the second ring, a first actuator configured to actuate a first pillar to selectively move the first ring to a raised position and a lowered position relative to the pedestal, and a second actuator configured to actuate a second pillar to selectively move the second ring to a raised position and a lowered position relative to the pedestal.
Public/Granted literature
- US20210183687A1 EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS Public/Granted day:2021-06-17
Information query
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