Invention Grant
- Patent Title: Breakdown voltage capability of high voltage device
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Application No.: US17949266Application Date: 2022-09-21
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Publication No.: US12027526B2Publication Date: 2024-07-02
- Inventor: Hsin-Chih Chiang , Tung-Yang Lin , Ruey-Hsin Liu , Ming-Ta Lei
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US17323016 2021.05.18
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/74 ; H01L21/762 ; H01L21/768 ; H01L21/84 ; H01L23/48 ; H01L29/06 ; H01L29/10 ; H01L29/423

Abstract:
Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a semiconductor substrate having a device substrate overlying a handle substrate and an insulator layer disposed between the device substrate and the handle substrate. A gate electrode overlies the device substrate between a drain region and a source region. A conductive via extends through the device substrate and the insulator layer to contact the handle substrate. A first isolation structure is disposed within the device substrate and comprises a first isolation segment disposed laterally between the gate electrode and the conductive via. A contact region is disposed within the device substrate between the first isolation segment and the conductive via. A conductive gate electrode directly overlies the first isolation segment and is electrically coupled to the contact region.
Public/Granted literature
- US20230014120A1 BREAKDOWN VOLTAGE CAPABILITY OF HIGH VOLTAGE DEVICE Public/Granted day:2023-01-19
Information query
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