Invention Grant
- Patent Title: Gradient raised frames n film bulk acoustic resonators
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Application No.: US17018847Application Date: 2020-09-11
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Publication No.: US12028041B2Publication Date: 2024-07-02
- Inventor: Jiansong Liu , Kwang Jae Shin , Jae Hyung Lee , Benjamin Paul Abbott , Chun Sing Lam
- Applicant: SKYWORKS GLOBAL PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: Skyworks Global Pte. Ltd.
- Current Assignee: Skyworks Global Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Chang & Hale LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/17 ; H03H9/56

Abstract:
Gradient raised frames in film bulk acoustic resonators. In some embodiments, a film bulk acoustic resonator device can include a substrate, first and second metal layers implemented over the substrate, a piezoelectric layer between the first and second metal layers, and a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.
Public/Granted literature
- US20210083643A1 GRADIENT RAISED FRAMES IN FILM BULK ACOUSTIC RESONATORS Public/Granted day:2021-03-18
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