Invention Grant
- Patent Title: Quantum conveyor and methods of producing a quantum conveyor
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Application No.: US17577808Application Date: 2022-01-18
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Publication No.: US12029142B2Publication Date: 2024-07-02
- Inventor: Wolfram Langheinrich , Claus Dahl
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H10N60/01 ; H10N60/10 ; H10N69/00 ; G06N10/40

Abstract:
A method of producing a quantum conveyor includes: forming a pair of screening gate electrodes in or on a semiconductor substrate and that extend between a first stationary quantum dot and a second stationary quantum dot, the pair of screening gate electrodes configured to delimit a channel of moveable quantum dots between the first stationary quantum dot and the second stationary quantum dot; forming, via a lithography process, a plurality of first planar transfer electrodes above the semiconductor substrate and that extend transverse to the channel of moveable quantum dots; and forming, via a self-aligned damascene process, a plurality of second planar transfer electrodes laterally interleaved with the first planar transfer electrodes, wherein the first planar transfer electrodes and the second planar transfer electrodes are configured to transfer quantum information between the first stationary quantum dot and the second stationary quantum dot through the channel of moveable quantum dots.
Public/Granted literature
- US20230232725A1 Quantum Conveyor and Methods of Producing a Quantum Conveyor Public/Granted day:2023-07-20
Information query
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