Invention Grant
- Patent Title: Microelectromechanical actuator on insulating substrate
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Application No.: US17503470Application Date: 2021-10-18
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Publication No.: US12030771B2Publication Date: 2024-07-09
- Inventor: John Wasserbauer
- Applicant: MICROGLASS LLC
- Applicant Address: US CA Castro Valley
- Assignee: MICROGLASS LLC
- Current Assignee: MICROGLASS LLC
- Current Assignee Address: US CA Castro Valley
- Agency: Wasserbauer Law, LLC
- Agent Nicholas E. Blanton, Esq.; Damian G. Wasserbauer, Esq.
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
The present disclosure relates to an apparatus, system, and method for a microelectromechanical (MEM) device formed on a transparent, insulating substrate. The MEM device may take the form of an electrostatic comb actuator. The fabrication process employs three-dimensional structuring of the substrate to form the actuator combs, biasing elements, and linkages. The combs and other elements of the actuator may be rendered electrically conducting by a conformal conductive coating. The conductive coating may be segmented into a plurality of electrodes without the use of standard lithography techniques. A linear-rotational actuator is provided, which may comprise two perpendicularly-arranged, linear actuators that utilize moveable linkage beams in two orthogonal dimensions. A linear or torsional ratcheting actuator is also provided by using comb actuators in conjunction with a ratcheting wheel or cog. Furthermore, several methods for electrically connecting non-contiguous or enclosed elements are provided.
Public/Granted literature
- US20230122065A1 MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE Public/Granted day:2023-04-20
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