Invention Grant
- Patent Title: Composition for forming block copolymer layer for formation of microphase-separated pattern
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Application No.: US17258227Application Date: 2019-07-16
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Publication No.: US12030974B2Publication Date: 2024-07-09
- Inventor: Ryuta Mizuochi , Yasunobu Someya , Hiroyuki Wakayama , Masami Kozawa , Shinsuke Tadokoro
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 18134225 2018.07.17
- International Application: PCT/JP2019/027889 2019.07.16
- International Announcement: WO2020/017494A 2020.01.23
- Date entered country: 2021-01-06
- Main IPC: C08F299/02
- IPC: C08F299/02 ; B29C71/02 ; C08F212/08 ; C08F212/14 ; C08F220/18 ; C08F222/40 ; C08F230/08 ; C08J5/18 ; H01L21/3065

Abstract:
A self-assembled film forming composition for forming a phase-separated structure of a block copolymer layer on a substrate, containing a block copolymer and a solvent, and is configured such that: the block copolymer is obtained by bonding a silicon-free polymer to a silicon-containing polymer that contains, as a constituent unit, styrene that is substituted by a silicon-containing group; the silicon-free polymer contains a structure derived from formula [1-1] or formula [1-2]; and the silicon-containing group contains one silicon atom. [In formula [1-1] or formula [1-2], each of R1 and R2 independently represents a hydrogen atom, a halogen atom or an alkyl group having 1-10 carbon atoms; and each of R3-R5 independently represents a hydrogen atom, a hydroxy group, a halogen atom, an alkyl group having 1-10 carbon atoms, an alkoxy group having 1-10 carbon atoms, a cyano group, an amino group, an amide group or a carbonyl group.]
Public/Granted literature
- US20210284782A1 COMPOSITION FOR FORMING BLOCK COPOLYMER LAYER FOR FORMATION OF MICROPHASE-SEPARATED PATTERN Public/Granted day:2021-09-16
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