A sensor element including a first ceramic layer (105), and a measurement electrode (110a) and a reference electrode (108a) disposed thereon, further comprising a through hole (105a) formed in the first ceramic layer, a through hole conductor (121c), a reference lead (108b) connected to the reference electrode and connected to the through hole conductor, and a second ceramic layer (103) disposed to face the first ceramic layer, the sensor element further including a gas flow chamber (130) provided between the first and second ceramic layers, and facing the through hole and being in communication with the reference lead, and a gas flow passage (170) open to a second region (100s) of an outer surface of the sensor element, thereby establishing communication between the gas flow chamber and an outside atmosphere. Also disclosed is gas sensor including the gas sensor element and a method for manufacturing the gas sensor element.