Invention Grant

Sensor device
Abstract:
A sensor device includes a substrate having a substrate surface, a first IDT electrode, a second IDT electrode, and a waveguide. The first IDT electrode and the second IDT electrode are positioned on the substrate surface. The waveguide is positioned on the substrate surface and between the first IDT electrode and the second IDT electrode. At least one of the first IDT electrode and the second IDT electrode includes a reference electrode and a signal electrode each including a plurality of electrode fingers, the plurality of electrode fingers being arranged in a juxtaposed manner in one direction. A distance between the at least one of the first IDT electrode and the second IDT electrode and the waveguide is shorter than an interval between the reference electrode and the signal electrode in the one direction.
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