Invention Grant
- Patent Title: Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation
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Application No.: US18166924Application Date: 2023-02-09
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Publication No.: US12032285B2Publication Date: 2024-07-09
- Inventor: Mingji Lou , Takahiro Yoshida , Steven T. Jenkins , Kenichi Kobayashi , Tatsuya Arakawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- The original application number of the division: US17183895 2021.02.24
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.
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