- Patent Title: Transfer apparatus having link arms and stockers having the same
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Application No.: US17683769Application Date: 2022-03-01
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Publication No.: US12033879B2Publication Date: 2024-07-09
- Inventor: Sangmin Kim , Youngwook Kim , Ginam Park , Chuljun Park , Jeongjae Bang , Jaesung Byun , Yongjun Ahn , Sangkyung Lee , Hyunwoo Lee , Junhyuk Chang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20210103189 2021.08.05
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G1/06 ; B65G1/127 ; H01L21/673

Abstract:
A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.
Public/Granted literature
- US20230041221A1 TRANSFER APPARATUS HAVING LINK ARMS AND STOCKERS HAVING THE SAME Public/Granted day:2023-02-09
Information query
IPC分类: