Invention Grant
- Patent Title: Manufacturing method of semiconductor package
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Application No.: US18165928Application Date: 2023-02-08
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Publication No.: US12033928B2Publication Date: 2024-07-09
- Inventor: Chia-Kuei Hsu , Ming-Chih Yew , Shu-Shen Yeh , Po-Yao Lin , Shin-Puu Jeng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- The original application number of the division: US17232066 2021.04.15
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/48 ; H01L21/56 ; H01L23/00 ; H01L23/31 ; H01L23/48 ; H01L23/498

Abstract:
A manufacturing method of a semiconductor package includes the following steps. A redistribution structure is formed. An encapsulated semiconductor device is provided on a first side of the redistribution structure, wherein the encapsulated semiconductor device comprising a semiconductor device encapsulated by an encapsulating material. A substrate is bonded to a second side of the redistribution structure opposite to the first side. The redistribution structure includes a plurality of vias connected to one another through a plurality of conductive lines and a redistribution line connected to the plurality of vias, and, from a top view, an angle greater than zero is included between adjacent two of the plurality of conductive lines.
Public/Granted literature
- US20230178465A1 MANUFACTURING METHOD OF SEMICONDUCTOR PACKAGE Public/Granted day:2023-06-08
Information query
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